Preparation of boron nitride thin films by microwave plasma...

Materials Science and Engineering: B 1997 Vol. 46; Iss. 1-3

Preparation of boron nitride thin films by microwave plasma enhanced CVD, for semiconductor applications

O. Baehr, P. Thévenin, A. Bath, A. Koukab, E. Losson, B. Lepley
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(96)01976-9
File:
PDF, 328 KB
english, 1997
Conversion to is in progress
Conversion to is failed