Growth and investigation of epitaxial 6H-SiC layers...

Materials Science and Engineering: B 1997 Vol. 46; Iss. 1-3

Growth and investigation of epitaxial 6H-SiC layers obtained by CVD on Lely-grown substrates

Viktor V. Zelenin, Alexander A. Lebedev, Sergey M. Starobinets, Valentin E. Chelnokov
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Volume:
46
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(97)00005-6
File:
PDF, 356 KB
english, 1997
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