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Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
R.P Ribas, J.L Leclercq, J.M Karam, B Courtois, P ViktorovitchVolume:
51
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0921-5107(97)00282-1
File:
PDF, 932 KB
english, 1998