Thermal stability of WSix and W ohmic contacts on GaN

Thermal stability of WSix and W ohmic contacts on GaN

X.A Cao, S.J Pearton, S.M Donovan, C.R Abernathy, F Ren, J.C Zolper, M.W Cole, A Zeitouny, M Eizenberg, R.J Shul, A.G Baca
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Volume:
59
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(98)00351-1
File:
PDF, 130 KB
english, 1999
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