Effect of implantation-parameters on the structural...

Materials Science and Engineering: B 1999 Vol. 59; Iss. 1-3

Effect of implantation-parameters on the structural properties of Mg-ion implanted GaN

A Wenzel, C Liu, B Rauschenbach
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Volume:
59
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(98)00409-7
File:
PDF, 107 KB
english, 1999
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