Heteroepitaxial growth of 3C-SiC on SOI for sensor applications
G Krötz, H Möller, M Eickhoff, S Zappe, R Ziermann, E Obermeier, J StoemenosVolume:
61-62
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0921-5107(98)00464-4
File:
PDF, 860 KB
english, 1999