Influence of the heating ramp on the heteroepitaxial growth...

Materials Science and Engineering: B 1999 Vol. 61-62; Iss. none

Influence of the heating ramp on the heteroepitaxial growth of SiC on Si

V Cimalla, Th Stauden, G Eichhorn, J Pezoldt
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Volume:
61-62
Year:
1999
Language:
english
Pages:
6
DOI:
10.1016/s0921-5107(98)00472-3
File:
PDF, 3.55 MB
english, 1999
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