Silicon carbide CVD homoepitaxy on wafers with reduced...

Silicon carbide CVD homoepitaxy on wafers with reduced micropipe density

S.E Saddow, M.S Mazzola, S.V Rendakova, V.A Dmitriev
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
61-62
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(98)00492-9
File:
PDF, 804 KB
english, 1999
Conversion to is in progress
Conversion to is failed