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Silicon carbide CVD homoepitaxy on wafers with reduced micropipe density
S.E Saddow, M.S Mazzola, S.V Rendakova, V.A DmitrievVolume:
61-62
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(98)00492-9
File:
PDF, 804 KB
english, 1999