New results in sublimation growth of the SiC epilayers

Materials Science and Engineering: B 1999 Vol. 61-62; Iss. none

New results in sublimation growth of the SiC epilayers

N.S. Savkina, A.A. Lebedev, D.V. Davydov, A.M. Strel’chuk, A.S. Tregubova, M.A. Yagovkina
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Volume:
61-62
Year:
1999
Language:
english
Pages:
3
DOI:
10.1016/s0921-5107(98)00494-2
File:
PDF, 209 KB
english, 1999
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