Effects of forming cavities on the lattice quality and...

Materials Science and Engineering: B 2000 Vol. 72; Iss. 2-3

Effects of forming cavities on the lattice quality and carrier profile in the B doped silicon

Shuangbao Wang, Peiran Zhu
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Volume:
72
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(99)00489-4
File:
PDF, 103 KB
english, 2000
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