Gettering issues using MeV ion implantation

Materials Science and Engineering: B 2000 Vol. 72; Iss. 2-3

Gettering issues using MeV ion implantation

George A Rozgonyi, John M Glasko, Kevin L Beaman, Sergei V Koveshnikov
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Volume:
72
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0921-5107(99)00506-1
File:
PDF, 954 KB
english, 2000
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