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Improvement of thin silicon on sapphire (SOS) film materials and device performances by solid phase epitaxy
Qi-Yuan Wang, Ji-Ping Nie, Fang Yu, Zhong-Li Liu, Yuan-Huan YuVolume:
72
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0921-5107(99)00511-5
File:
PDF, 121 KB
english, 2000