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A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation
Ofir Bochobza-Degani, Dan J Seter, E Socher, Y NemirovskyVolume:
83
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(00)00297-1
File:
PDF, 1.47 MB
english, 2000