Volume 83; Issue 1-3

Sensors and Actuators A: Physical

Volume 83; Issue 1-3

1

Microcoils and microrelays — an optimized multilayer fabrication process

Markus Ohnmacht, Volker Seidemann, Stephanus Büttgenbach

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.35 MB

english, 2000

2

High-resolution liquid volume detection in sub-nanoliter reactors

Kari T. Hjelt, Richard van den Doel, Wijnand Lubking, Michiel J. Vellekoop

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 730 KB

english, 2000

3

Single chip CMOS imagers and flexible microelectronic stimulators for a retina implant system

M Schwarz, L Ewe, R Hauschild, B.J Hosticka, J Huppertz, S Kolnsberg, W Mokwa, H.K Trieu

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.97 MB

english, 2000

4

Tuning fork silicon angular rate sensor with enhanced performance for automotive applications

S Sassen, R Voss, J Schalk, E Stenzel, T Gleissner, R Gruenberger, F Neubauer, W Ficker, W Kupke, K Bauer, M Rose

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 870 KB

english, 2000

5

Development of a levitated micromotor for application as a gyroscope

C Shearwood, K.Y Ho, C.B Williams, H Gong

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 830 KB

english, 2000

6

Measurement of mechanical properties of eardrum, middle ear exudate and inner ear membranes

M Nakao, T Okusa, Y Hatamura

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 413 KB

english, 2000

7

Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range

J.Kurth Reynolds, David Catling, Randel C Blue, Nadim I Maluf, Thomas Kenny

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 741 KB

english, 2000

8

Low-cost post-CMOS integration of electroplated microstructures for inertial sensing

M. Wycisk, T. Tönnesen, J. Binder, S. Michaelis, H.-J. Timme

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 2.39 MB

english, 2000

9

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.74 MB

english, 2000

10

A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation

Ofir Bochobza-Degani, Dan J Seter, E Socher, Y Nemirovsky

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.47 MB

english, 2000

11

A flat type touch probe sensor using PZT thin film vibrator

T. Kanda, T. Morita, M.K. Kurosawa, T. Higuchi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 628 KB

english, 2000

12

Atomic force microscopy probe with piezoresistive read-out and a highly symmetrical Wheatstone bridge arrangement

J Thaysen, A Boisen, O Hansen, S Bouwstra

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.12 MB

english, 2000

13

Anodic bonding of evaporated glass structured with lift-off technology for hermetical sealing

S Sassen, W Kupke, K Bauer

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 2.17 MB

english, 2000

14

Condition optimization, reliability evaluation of SiO2–SiO2 HF bonding and its application for UV detection micro flow cell

H Nakanishi, T Nishimoto, M Kanai, T Saitoh, R Nakamura, T Yoshida, S Shoji

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.07 MB

english, 2000

15

A micromachined cavity resonator for millimeter-wave oscillator applications

Chungwoo Kim, Insang Song, Cimoo Song, Changyul Cheon, Youngwoo Kwon, Sukhan Lee

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 910 KB

english, 2000

16

Electroforming of 3D microstructures on highly structured surfaces

L.S. Johansen, M. Ginnerup, J.T. Ravnkilde, P.T. Tang, B. Löchel

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.04 MB

english, 2000

17

A raster-scanning full-motion video display using polysilicon micromachined mirrors

Robert A Conant, Paul M Hagelin, Uma Krishnamoorthy, Matthew Hart, Olav Solgaard, Kam Y Lau, Richard S Muller

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 832 KB

english, 2000

18

Design and fabrication of infrared detector arrays for satellite attitude control

A.W., F.G. van Herwaarden, S.A. Molenaar, E.J.G. Goudena, M. Laros, P.M. Sarro, C.A. Schot, W. van der Vlist, L. Blarre, J.P. Krebs

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.51 MB

english, 2000

19

Microscale material testing of single crystalline silicon: process effects on surface morphology and tensile strength

Taechung Yi, Lu Li, Chang-Jin Kim

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.89 MB

english, 2000

20

Highly sensitive thermistors based on high-purity polycrystalline cubic silicon carbide

Elder A de Vasconcelos, S.A Khan, W.Y Zhang, H Uchida, T Katsube

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 177 KB

english, 2000

21

Silicon micro-optical scanner

Norihiro Asada, Masaru Takeuchi, Vladimir Vaganov, Nickolai Belov, Sebastiaan in't Hout, Igor Sluchak

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 605 KB

english, 2000

22

Free space communication link using a grating light modulator

D Pedersen, O Solgaard

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 523 KB

english, 2000

23

A new tunneling-based sensor for inertial rotation rate measurements

R.L Kubena, D.J Vickers-Kirby, R.J Joyce, F.P Stratton, D.T Chang

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.58 MB

english, 2000

24

Three-dimensional micro self-assembly using bridging flocculation

T. Nakakubo, I. Shimoyama

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 499 KB

english, 2000

25

Index

Journal:

Sensors and Actuators A: Physical

Year:

2000

File:

PDF, 17 KB

2000

26

Index

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 38 KB

english, 2000

27

Gas flow in constriction microdevices

Xinxin Li, Wing Yin Lee, Man Wong, Yitshak Zohar

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.03 MB

english, 2000

28

Capacitive differential pressure sensor for harsh environments

S.T Moe, K Schjølberg-Henriksen, D.T Wang, E Lund, J Nysæther, L Furuberg, M Visser, T Fallet, R.W Bernstein

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 494 KB

english, 2000

29

A bulk micromachined vibratory lateral gyroscope fabricated with wafer bonding and deep trench etching

Zhihong Li, Zhenchuan Yang, Zhixiong Xiao, Yilong Hao, Ting Li, Guoying Wu, Yangyuan Wang

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.71 MB

english, 2000

30

Estimation of components and concentration in mixture solutions of electrolytes using a liquid flow system with SH-SAW sensor

Toshihisa Yamazaki, Jun Kondoh, Yoshikazu Matsui, Showko Shiokawa

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 421 KB

english, 2000

31

Cantilever with integrated resonator for application of scanning probe microscope

D.W Lee, Takahito Ono, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.40 MB

english, 2000

32

Fiber-optic vibration sensor based on frequency modulation of light-excited oscillators

J.David Zook, William R Herb, C.J Bassett, Terry Stark, Jeff N Schoess, Mark L Wilson

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.32 MB

english, 2000

33

Fabrication and in vitro test of a microsyringe

Sang Woo Lee, Woo Young Sim, Sang Sik Yang

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 2.26 MB

english, 2000

34

Integration of through-wafer interconnects with a two-dimensional cantilever array

E.M Chow, H.T Soh, H.C Lee, J.D Adams, S.C Minne, G Yaralioglu, A Atalar, C.F Quate, T.W Kenny

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.30 MB

english, 2000

35

MEMS micro-valve for space applications

I Chakraborty, W.C Tang, D.P Bame, T.K Tang

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 730 KB

english, 2000

36

Fracture toughness and crack growth phenomena of plasma-etched single crystal silicon

A.M Fitzgerald, R.H Dauskardt, T.W Kenny

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 584 KB

english, 2000

37

Design, optimization and simulation on microelectromagnetic pump

Qiulian Gong, Zhaoying Zhou, Yihua Yang, Xiaohao Wang

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 834 KB

english, 2000

38

SMA microgripper with integrated antagonism

M Kohl, E Just, W Pfleging, S Miyazaki

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.41 MB

english, 2000

39

Thin film shape memory microvalves with adjustable operation temperature

M Kohl, D Dittmann, E Quandt, B Winzek

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.51 MB

english, 2000

40

Silicon micro optical switching device with an electromagnetically operated cantilever

Tsukasa Matsuura, Tatsuya Fukami, Martial Chabloz, Yuichi Sakai, Shin-ichi Izuo, Aritomo Uemura, Shin-ichi Kaneko, Kazuhiko Tsutsumi, Koichi Hamanaka

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.09 MB

english, 2000

41

Vaporizing liquid microthruster

E.V Mukerjee, A.P Wallace, K.Y Yan, D.W Howard, R.L Smith, S.D Collins

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 559 KB

english, 2000

42

Low voltage electrothermal vibromotor for silicon optical bench applications

Minfan Pai, Norman C Tien

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.24 MB

english, 2000

43

Development of a new type piezoelectric micromotor

Y. Suzuki, K. Tani, T. Sakuhara

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 374 KB

english, 2000

44

Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm

Ok Chan Jeong, Sang Sik Yang

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1023 KB

english, 2000

45

Rapid biochemical detection and differentiation with magnetic force microscope cantilever arrays

R.G Rudnitsky, E.M Chow, T.W Kenny

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 695 KB

english, 2000

46

Pull-in time–energy product of electrostatic actuators: comparison of experiments with simulation

L Castañer, A Rodrı́guez, J Pons, S.D Senturia

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 391 KB

english, 2000

47

The property of plasma-polymerized fluorocarbon film in relation to CH4/C4F8 ratio and substrate temperature

Yoshinori Matsumoto, Makoto Ishida

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 1.10 MB

english, 2000

48

A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer)

Takeshi Morita, Minoru Kuribayashi Kurosawa, Toshiro Higuchi

Journal:

Sensors and Actuators A: Physical

Year:

2000

Language:

english

File:

PDF, 571 KB

english, 2000

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