![](/img/cover-not-exists.png)
A flat type touch probe sensor using PZT thin film vibrator
T. Kanda, T. Morita, M.K. Kurosawa, T. HiguchiVolume:
83
Year:
2000
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(00)00298-3
File:
PDF, 628 KB
english, 2000