Technology and micro-Raman characterization of thick meso-porous silicon layers for thermal effect microsystems
S Périchon, V Lysenko, Ph Roussel, B Remaki, B Champagnon, D Barbier, P PinardVolume:
85
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(00)00327-7
File:
PDF, 217 KB
english, 2000