Volume 85; Issue 1-3

Sensors and Actuators A: Physical

Volume 85; Issue 1-3
1

Sub-cooled water detection in silicon dew point hygrometer

R Jachowicz, J Weremczuk
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 1.01 MB
english, 2000
8

Not-plate-like Hall magnetic sensors and their applications

R.S Popovic
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 2.72 MB
english, 2000
10

Planar Hall effect in the vertical Hall sensor

Ch Schott, P.-A Besse, R.S Popovic
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 385 KB
english, 2000
14

Integrated microsystem for blue/UV detection

A Pauchard, B Furrer, Z Randjelovic, A Rochas, D Manic, R.S Popovic
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 386 KB
english, 2000
20

Wafer bonding by low-temperature soldering

Chengkuo Lee, Wei-Feng Huang, Jin-Shown Shie
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 735 KB
english, 2000
23

New position detectors based on AMR sensors

Derk Jan Adelerhof, Wim Geven
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 533 KB
english, 2000
24

Robust giant magnetoresistance sensors

K.-M.H Lenssen, D.J Adelerhof, H.J Gassen, A.E.T Kuiper, G.H.J Somers, J.B.A.D van Zon
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 435 KB
english, 2000
28

High sensitivity magnetic field sensor

G Vértesy, A Gasparics, J Szöllősy
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 551 KB
english, 2000
30

Wide range semiconductor flow sensors

A Glaninger, A Jachimowicz, F Kohl, R Chabicovsky, G Urban
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 392 KB
english, 2000
33

Microwave enhanced fast anisotropic etching of monocrystalline silicon

Jan A Dziuban
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 662 KB
english, 2000
34

Laminated, sacrificial-poly MEMS technology in standard CMOS

D.F Guillou, S Santhanam, L.R Carley
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 723 KB
english, 2000
35

Ultra low noise induction magnetometer for variable temperature operation

R.J. Prance, T.D. Clark, H. Prance
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 252 KB
english, 2000
36

Low-temperature semiconductor mechanical sensors

I Maryamova, A Druzhinin, E Lavitska, I Gortynska, Y Yatzuk
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 211 KB
english, 2000
42

Free-standing, mobile 3D porous silicon microstructures

G Lammel, Ph Renaud
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 267 KB
english, 2000
43

Comparison of different micromechanical vacuum sensors

Gerlinde Bedö, Werner Kraus, Rudolf Müller
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 719 KB
english, 2000
44

Two-dimensional thermally actuated optical microprojector

S Schweizer, P Cousseau, G Lammel, S Calmes, Ph Renaud
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 327 KB
english, 2000
45

CMOS-compatible capacitive high temperature pressure sensors

Klaus Kasten, Jörg Amelung, Wilfried Mokwa
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 473 KB
english, 2000
47

Race-track fluxgate with adjustable feedthrough

Pavel Ripka
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 237 KB
english, 2000
52

Temperature cross-sensitivity of Hall plate in submicron CMOS technology

D Manic, J Petr, R.S Popovic
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 247 KB
english, 2000
54

Micro-springs for temporary chip connections

C Krüger, D.J Bartelink, T Fritz, T Leuerer, W Mokwa, U Schnakenberg
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 353 KB
english, 2000
56

A 3-phase model for VIS/NIR μC-Si:H p–i–n detectors

M Vieira, A Fantoni, M Fernandes, A Maçarico, R Schwarz
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 639 KB
english, 2000
60

Spectral analysis through electromechanical coupling

E. Cretu, M. Bartek, R.F. Wolffenbuttel
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 835 KB
english, 2000
61

Smart load cells: an industrial application

J.G. Rocha, C. Couto, J.H. Correia
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 317 KB
english, 2000
62

New photoresist coating method for 3-D structured wafers

V.G Kutchoukov, J.R Mollinger, A Bossche
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 529 KB
english, 2000
65

Drop test and analysis on micro-machined structures

G.X Li, F.A Shemansky Jr.
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 416 KB
english, 2000
66

High Tc SQUID sensor system for non-destructive evaluation

G Kallias, E Devlin, C Christides, D Niarchos
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 484 KB
english, 2000
67

Integrated on-line multisensing of fluid flow using a mechanical resonator

Alan L Dring, Barry E Jones
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 205 KB
english, 2000
68

Initial pits for electrochemical etching in hydrofluoric acid

H Ohji, P.J French, S Izuo, K Tsutsumi
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 520 KB
english, 2000
69

Low frequency underwater piezoceramic transducer

Irinela Chilibon
Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 192 KB
english, 2000
70

Index

Journal:
Sensors and Actuators A: Physical
Year:
2000
File:
PDF, 21 KB
2000
71

Index

Journal:
Sensors and Actuators A: Physical
Year:
2000
Language:
english
File:
PDF, 44 KB
english, 2000