Intrinsic thermal behaviour of capacitive pressure sensors: mechanisms and minimisation
G Blasquez, X Chauffleur, P Pons, C Douziech, P Favaro, Ph MeniniVolume:
85
Year:
2000
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(00)00369-1
File:
PDF, 235 KB
english, 2000