Acceleration threshold switches from an additive...

Sensors and Actuators A: Physical 2000 Vol. 85; Iss. 1-3

Acceleration threshold switches from an additive electroplating MEMS process

Sven Michaelis, Hans-Joerg Timme, Michael Wycisk, Josef Binder
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Volume:
85
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(00)00377-0
File:
PDF, 626 KB
english, 2000
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