Performance of GaAs micromachined microactuator
T. Lalinský, E. Burian, M. Drz̆ı́k, Š. Hašc̆ı́k, Z̆. Mozolová, J. Kuzmı́k, Z. HatzopoulosVolume:
85
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(00)00378-2
File:
PDF, 231 KB
english, 2000