Comparison of different micromechanical vacuum sensors

Sensors and Actuators A: Physical 2000 Vol. 85; Iss. 1-3

Comparison of different micromechanical vacuum sensors

Gerlinde Bedö, Werner Kraus, Rudolf Müller
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Volume:
85
Year:
2000
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(00)00383-6
File:
PDF, 719 KB
english, 2000
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