CMOS-based microsensors and packaging

Sensors and Actuators A: Physical 2001 Vol. 92; Iss. 1-3

CMOS-based microsensors and packaging

Henry Baltes, Oliver Brand
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Volume:
92
Year:
2001
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(01)00532-5
File:
PDF, 983 KB
english, 2001
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