Volume 92; Issue 1-3

Sensors and Actuators A: Physical

Volume 92; Issue 1-3
1

CMOS-based microsensors and packaging

Henry Baltes, Oliver Brand
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 983 KB
english, 2001
5

Symmetrical core improves micro-fluxgate sensors

P. Ripka, S.O. Choi, A. Tipek, S. Kawahito, M. Ishida
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 282 KB
english, 2001
7

Is ellipsometry suitable for sensor applications?

H. Arwin
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 334 KB
english, 2001
8

Microspectrometer based on a tunable optical filter of porous silicon

G Lammel, S Schweizer, Ph Renaud
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 506 KB
english, 2001
11

Particle detection using an integrated capacitance sensor

T.A. York, I.G. Evans, Z. Pokusevski, T. Dyakowski
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 505 KB
english, 2001
12

A CMOS humidity sensor with on-chip calibration

Y.Y. Qiu, C. Azeredo-Leme, L.R. Alcácer, J.E. Franca
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 490 KB
english, 2001
13

Infrared micro-spectrometer based on a diffraction grating

S.H. Kong, D.D.L. Wijngaards, R.F. Wolffenbuttel
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 617 KB
english, 2001
14

Modular design of AFM probe with sputtered silicon tip

P.A. Rasmussen, J. Thaysen, S. Bouwstra, A. Boisen
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 363 KB
english, 2001
15

DP flow sensor using optical fibre Bragg grating

J. Lim, Q.P. Yang, B.E. Jones, P.R. Jackson
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 625 KB
english, 2001
22

Velocity field of the fully developed laminar flow in a hexagonal duct

N Damean, P.P.L Regtien
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 185 KB
english, 2001
23

ITO/SiOx/Si optical sensor with internal gain

M. Fernandes, Yu. Vygranenko, R. Schwarz, M. Vieira
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 138 KB
english, 2001
27

Resonant accelerometer with self-test

M. Aikele, K. Bauer, W. Ficker, F. Neubauer, U. Prechtel, J. Schalk, H. Seidel
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 427 KB
english, 2001
32

A new sensor structure using the piezojunction effect in PNP lateral transistors

F. Fruett, G.C.M. Meijer
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 233 KB
english, 2001
34

Patterning of polyimide and metal in deep trenches

V.G. Kutchoukov, J.R. Mollinger, M. Shikida, A. Bossche
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 361 KB
english, 2001
35

Conformal coatings for 3D multichip microsystem encapsulation

Jakob Janting, Jens Branebjerg, Pirmin Rombach
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 247 KB
english, 2001
36

Low temperature full wafer adhesive bonding of structured wafers

F. Niklaus, H. Andersson, P. Enoksson, G. Stemme
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 383 KB
english, 2001
38

A miniature manipulator for integration in a self-propelling endoscope

J. Peirs, D. Reynaerts, H. Van Brussel
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 383 KB
english, 2001
44

Macroporous-based micromachining on full wafers

H. Ohji, S. Izuo, P.J. French, K. Tsutsumi
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 484 KB
english, 2001
47

Plasma assisted room temperature bonding for MST

A. Weinert, P. Amirfeiz, S. Bengtsson
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 1.31 MB
english, 2001
48

Sodium distribution in thin-film anodic bonding

M.M. Visser, S. Weichel, P. Storås, R. de Reus, A.B. Hanneborg
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 234 KB
english, 2001
51

A beam-forming transmit ASIC for driving ultrasonic arrays

John V. Hatfield, Kwet Seng Chai
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 225 KB
english, 2001
52

A wind-sensor interface using thermal sigma delta modulation techniques

K.A.A. Makinwa, J.H. Huijsing
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 190 KB
english, 2001
58

Magnetorheologic fluids for actuators

L. Zipser, L. Richter, U. Lange
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 448 KB
english, 2001
60

CONFERENCE CALENDAR

Journal:
Sensors and Actuators A: Physical
Year:
2001
File:
PDF, 24 KB
2001
61

LIST OF SNA CONFERENCES

Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 28 KB
english, 2001
62

AUTHOR INDEX FOR VOLUME A92

Journal:
Sensors and Actuators A: Physical
Year:
2001
File:
PDF, 33 KB
2001
63

SUBJECT INDEX FOR A92

Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 57 KB
english, 2001