High-pressure silicon sensor with low-cost packaging

High-pressure silicon sensor with low-cost packaging

K. Birkelund, Peter Gravesen, Sergey Shiryaev, Per Brandt Rasmussen, Maria Dall Rasmussen
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Volume:
92
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(01)00534-9
File:
PDF, 330 KB
english, 2001
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