Chip-size-packaged silicon microphones
M. Müllenborn, P. Rombach, U. Klein, K. Rasmussen, J.F. Kuhmann, M. Heschel, M.Amskov Gravad, J. Janting, J. Branebjerg, A.C. Hoogerwerf, S. BouwstraVolume:
92
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(01)00535-0
File:
PDF, 681 KB
english, 2001