![](/img/cover-not-exists.png)
Patterning of polyimide and metal in deep trenches
V.G. Kutchoukov, J.R. Mollinger, M. Shikida, A. BosscheVolume:
92
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(01)00565-9
File:
PDF, 361 KB
english, 2001