Proton beam micromachining: a new tool for precision...

Sensors and Actuators A: Physical 2001 Vol. 92; Iss. 1-3

Proton beam micromachining: a new tool for precision three-dimensional microstructures

J.A. van Kan, A.A. Bettiol, B.S. Wee, T.C. Sum, S.M. Tang, F. Watt
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Volume:
92
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(01)00574-x
File:
PDF, 416 KB
english, 2001
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