Investigation of TMAH for front-side bulk micromachining...

Sensors and Actuators A: Physical 2001 Vol. 92; Iss. 1-3

Investigation of TMAH for front-side bulk micromachining process from manufacturing aspect

Jiunn-jye Tsaur, Chen-Hsun Du, Chengkuo Lee
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Volume:
92
Year:
2001
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(01)00575-1
File:
PDF, 611 KB
english, 2001
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