Simulation procedure to improve piezoresistive microsensors...

Simulation procedure to improve piezoresistive microsensors used for monitoring ball bonding

R. Osorio, M. Mayer, J. Schwizer, J.G. Korvink, H. Baltes
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Volume:
92
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(01)00587-8
File:
PDF, 571 KB
english, 2001
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