A low-voltage torsional actuator for application in...

A low-voltage torsional actuator for application in RF-microswitches

F. Plötz, S. Michaelis, R. Aigner, H.-J. Timme, J. Binder, R. Noé
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Volume:
92
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(01)00589-1
File:
PDF, 469 KB
english, 2001
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