Surface micromachined piezoelectric resonant beam filters
Brett Piekarski, Don DeVoe, Madan Dubey, Roger Kaul, John ConradVolume:
91
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(01)00601-x
File:
PDF, 466 KB
english, 2001