Volume 91; Issue 3

Sensors and Actuators A: Physical

Volume 91; Issue 3
5

Linear, nonlinear and mixed-regime analysis of electrostatic MEMS

Gang Li, N.R. Aluru
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 786 KB
english, 2001
11

A vertical micromachined resistive heater for a micro-gas separation column

J.K. Robertson
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 517 KB
english, 2001
12

On-chip eddy current sensor for proximity sensing and crack detection

Daniel J. Sadler, Chong H. Ahn
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 382 KB
english, 2001
13

Latching microelectromagnetic relays

M. Ruan, J. Shen, C.B. Wheeler
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 268 KB
english, 2001
14

A multifunctional silicon-based microscale surgical system

Il-Seok Son, Amit Lal, Bill Hubbard, Tim Olsen
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 466 KB
english, 2001
20

Hermetic wafer bonding based on rapid thermal processing

Mu Chiao, Liwei Lin
Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 469 KB
english, 2001
21

Conference Calendar

Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 25 KB
english, 2001
22

List of SNA Conferences

Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 27 KB
english, 2001
23

Author Index of Vol SNA 91

Journal:
Sensors and Actuators A: Physical
Year:
2001
File:
PDF, 33 KB
2001
24

Volume Index of Vol SNA 91

Journal:
Sensors and Actuators A: Physical
Year:
2001
Language:
english
File:
PDF, 66 KB
english, 2001