Mechanical characterization and reliability study of...

Sensors and Actuators A: Physical 2002 Vol. 99; Iss. 1-2

Mechanical characterization and reliability study of bistable SiO2/Si membranes for microfluidic applications

C. Malhaire, A. Didiergeorges, M. Bouchardy, D. Barbier
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Volume:
99
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(01)00891-3
File:
PDF, 143 KB
english, 2002
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