Volume 99; Issue 1-2

Sensors and Actuators A: Physical

Volume 99; Issue 1-2

1

Preface

Joan Ramón Morante, Daniel Barbier, Bernd Michel

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 39 KB

english, 2002

2

Polysilicon: a versatile material for microsystems

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 481 KB

english, 2002

3

Characterization of mechanical and thermal properties of thin Cu foils and wires

B. Weiss, V. Gröger, G. Khatibi, A. Kotas, P. Zimprich, R. Stickler, B. Zagar

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 520 KB

english, 2002

4

Generalized fracture mechanical integral concept JG and its application in microelectronic packaging technology

H.B. Ghavifekr, B. Michel

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 280 KB

english, 2002

5

Shape memory thin films with transition above room temperature from Ni-rich NiTi films

N. Frantz, E. Dufour-Gergam, J.P. Grandchamp, A. Bosseboeuf, W. Seiler, G. Nouet, G. Catillon

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 245 KB

english, 2002

6

Characterisation of constitutive behaviour of SnAg, SnAgCu and SnPb solder in flip chip joints

S. Wiese, F. Feustel, E. Meusel

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 530 KB

english, 2002

7

Thermal isolation in microsystems with porous silicon

V. Lysenko, S. Périchon, B. Remaki, D. Barbier

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 405 KB

english, 2002

8

Creep behaviour of lead free and lead containing solder materials at high homologous temperatures with regard to small solder volumes

J. Villain, O.S. Brueller, T. Qasim

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 153 KB

english, 2002

9

PZT thin films integration for the realisation of a high sensitivity pressure microsensor based on a vibrating membrane

E. Defaÿ, C. Millon, C. Malhaire, D. Barbier

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 170 KB

english, 2002

10

Fracture mechanics of bonding interface: a cohesive zone model

K. Kishimoto, M. Omiya, W. Yang

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 334 KB

english, 2002

11

Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

E.J. Connolly, G.M. O’Halloran, H.T.M. Pham, P.M. Sarro, P.J. French

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 399 KB

english, 2002

12

Correlation between epitaxial growth conditions of 3C–SiC thin films on Si and mechanical behavior of 3C–SiC self-suspended membranes

C. Gourbeyre, T. Chassagne, M. Le Berre, G. Ferro, E. Gautier, Y. Monteil, D. Barbier

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 270 KB

english, 2002

13

On the properties and functionality of ultra-thin diamond related protective coatings used in optical systems

M. Gioti, S. Logothetidis, C. Charitidis, Y. Panayiotatos, I. Varsano

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 328 KB

english, 2002

14

The effects of deposition and annealing conditions on crystallographic properties of sputtered barium ferrite thick films

B. Bayard, J.P. Chatelon, M. Le Berre, H. Joisten, J.J. Rousseau, Barbier

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 199 KB

english, 2002

15

Fatigue study of SrBi2Ta2O9 thin films processed in forming gas

Tao Yu, Dong-Sheng Wang, Di Wu, Ai-Dong Li, Yi-Dong Xia, An Hu, Zhi-Guo Liu, Nai-Ben Ming

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 104 KB

english, 2002

16

Time effect on the ferroelectric properties of SrBi2Ta2O9 thin films in forming gas processing

Tao Yu, Dong-Sheng Wang, Di Wu, Ai-Dong Li, An Hu, Zhi-Guo Liu, Nai-Ben Ming

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 106 KB

english, 2002

17

Mechanical characterization and reliability study of bistable SiO2/Si membranes for microfluidic applications

C. Malhaire, A. Didiergeorges, M. Bouchardy, D. Barbier

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 143 KB

english, 2002

18

Role of the i layer surface properties on the performance of a-Si:H Schottky barrier photodiodes

H. Águas, E. Fortunato, R. Martins

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 116 KB

english, 2002

19

Photoluminescence of Eu-doped titania xerogel spin-on deposited on porous anodic alumina

N.V. Gaponenko, I.S. Molchan, G.E. Thompson, P. Skeldon, A. Pakes, R. Kudrawiec, L. Bryja, J. Misiewicz

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 104 KB

english, 2002

20

Conducting polymer films by UV-photo processing

Q. Fang, D.G. Chetwynd, J.W. Gardner

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 236 KB

english, 2002

21

Electrochemical deposition of metal layers and structures for Si-based microsystems

S. Martı́nez, N. Yaakoubi, A. Pérez-Rodrı́guez, C. Serre, P. Gorostiza, J.R. Morante, J. Esteve

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 222 KB

english, 2002

22

Rhenium deposition on a silicon surface at the room temperature for application in microsystems

V. Petrovich, M. Haurylau, S. Volchek

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 207 KB

english, 2002

23

Copper micromoulding process for NMR microinductors realization

A.-L Coutrot, E Dufour-Gergam, J.-M Quemper, E Martincic, J.-P Gilles, J.-P Grandchamp, M Matlosz, A Sanchez, L Darasse, J.-C Ginefri

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 285 KB

english, 2002

24

Structural characterisation of NiTi thin film shape memory alloys

Francisco M.Braz Fernandes, Rui Martins, M. Teresa Nogueira, Rui J.C. Silva, Patrı́cia Nunes, Daniel Costa, Isabel Ferreira, Rodrigo Martins

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 199 KB

english, 2002

25

Fabrication of UV-transparent SixOyNz membranes with a low frequency PECVD reactor

K. Danaie, A. Bosseboeuf, C. Clerc, C. Gousset, G. Julie

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 131 KB

english, 2002

26

Design, fabrication and modeling of solid propellant microrocket-application to micropropulsion

C Rossi, S Orieux, B Larangot, T Do Conto, D Estève

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 358 KB

english, 2002

27

Micromachining of a silicon multichannel microprobe for neural electrical activity recording

Carmen Moldovan, V. Ilian, Ghe. Constantin, Rodica Iosub, M. Modreanu, Ioana Dinoiu, B. Firtat, C. Voitincu

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 499 KB

english, 2002

28

The etching behavior of APCVD PSG thin films used as sacrificial layers for surface micromachined resonant microstructures

M. Modreanu, Carmen Moldovan, Rodica Iosub

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 104 KB

english, 2002

29

Fabrication of capacitive micromechanical ultrasonic transducers by low-temperature process

D. Memmi, V. Foglietti, E. Cianci, G. Caliano, M. Pappalardo

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 516 KB

english, 2002

30

Experiments for microphotonic components fabrication using Si 〈1 1 1〉 etching techniques

Dana Cristea, Munizer Purica, Elena Manea, Viorel Avramescu

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 487 KB

english, 2002

31

Thermal investigation of micro-filament heaters

P. Fürjes, Zs. Vizváry, M. Ádám, A. Morrissey, Cs. Dücső, I. Bársony

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 238 KB

english, 2002

32

Silicon membranes fabrication by wet anisotropic etching

Rodica Iosub, Carmen Moldovan, M. Modreanu

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 637 KB

english, 2002

33

Advanced micromachining processes for micro-opto-electromechanical components and devices

G. D’Arrigo, S. Coffa, C. Spinella

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 404 KB

english, 2002

34

Micro- and nanomaterials characterization by image correlation methods

D. Vogel, A. Gollhardt, B. Michel

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 652 KB

english, 2002

35

Microstructural information from optical properties of LPCVD silicon films annealed at low temperature

M. Gartner, M. Modreanu, C. Cobianu, R. Gavrila, M. Danila

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 269 KB

english, 2002

36

IR-spectra of waveguides in LiNbO3 obtained by using different melts

M.K. Kuneva, S.H. Tonchev, M. Sendova-Vasileva, D. Dimova-Malinovska, P.A. Atanasov

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 121 KB

english, 2002

37

Modern optical measurement station for micro-materials and micro-elements studies

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 638 KB

english, 2002

38

Void formation and electromigration in sputtered Ag lines with different encapsulations

M. Hauder, J. Gstöttner, W. Hansch, D. Schmitt-Landsiedel

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 358 KB

english, 2002

39

Miniature transducers based on Si whisker joints

S.S. Varshava, I.P. Ostrovskii

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 149 KB

english, 2002

40

Conference Calendar

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 29 KB

english, 2002

41

List of conferences

Journal:

Sensors and Actuators A: Physical

Year:

2002

Language:

english

File:

PDF, 32 KB

english, 2002

To build up a library is to create a life. It’s never just a random collection of books.

— Carlos María Domínguez

Official channel

Z-Library Desktop Launcher

Tor version

Z-Library

Z-Library Since 2009 support@z-lib.do

EnglishРусскийEspañolItalianoελληνικάاللغة العربيةBahasa IndonesiaBahasa Malaysiaहिन्दीDeutschFrançaisPortuguêsУкраїнськаPolski中文繁體中文日本語Tiếng ViệtAzərbaycan DiliՀայոց լեզուภาษาไทยTürk Diliქართველიবাংলাپښتوతెలుగుاردو한국어SrpskiБългарски