The etching behavior of APCVD PSG thin films used as sacrificial layers for surface micromachined resonant microstructures
M. Modreanu, Carmen Moldovan, Rodica IosubVolume:
99
Year:
2002
Language:
english
Pages:
3
DOI:
10.1016/s0924-4247(01)00902-5
File:
PDF, 104 KB
english, 2002