Silicon membranes fabrication by wet anisotropic etching

Silicon membranes fabrication by wet anisotropic etching

Rodica Iosub, Carmen Moldovan, M. Modreanu
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Volume:
99
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(01)00906-2
File:
PDF, 637 KB
english, 2002
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