Advanced micromachining processes for...

Advanced micromachining processes for micro-opto-electromechanical components and devices

G. D’Arrigo, S. Coffa, C. Spinella
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Volume:
99
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(01)00907-4
File:
PDF, 404 KB
english, 2002
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