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Advanced micromachining processes for micro-opto-electromechanical components and devices
G. D’Arrigo, S. Coffa, C. SpinellaVolume:
99
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(01)00907-4
File:
PDF, 404 KB
english, 2002