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Fabrication of improved piezoresistive silicon cantilever probes for the atomic force microscope
Y Su, A.G.R Evans, A Brunnschweiler, G Ensell, M KochVolume:
60
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(96)01416-1
File:
PDF, 399 KB
english, 1997