Volume 60; Issue 1-3

Sensors and Actuators A: Physical

Volume 60; Issue 1-3

1

Low power consumption thermal gas-flow sensor based on thermopiles of highly effective thermoelectric materials

U Dillner, E Kessler, S Poser, V Baier, J Müller

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 400 KB

english, 1997

2

Chopping of a weak magnetic field by a saturable magnetic shield

Laurent Chiesi, Karim Haroud, John A Flanagan, Rade S Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 442 KB

english, 1997

3

Compensation of the temperature-dependent offset drift of a Hall sensor

Hubert Blanchard, Christina de Raad Iseli, Rade S Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 330 KB

english, 1997

4

A 400°C silicon Hall sensor

S.R in't Hout, S Middelhoek

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 920 KB

english, 1997

5

Novel miniature integrated optical goniometers

R.E Kunz, J Dübendorfer

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 548 KB

english, 1997

6

Torque sensor employing a mechanical resonator

N Whitehead, A Cheshmehdoost, A Verrall, B.E Jones

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 260 KB

english, 1997

7

Fabrication of improved piezoresistive silicon cantilever probes for the atomic force microscope

Y Su, A.G.R Evans, A Brunnschweiler, G Ensell, M Koch

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 399 KB

english, 1997

8

Electrostatic actuation as a self-testing method for silicon pressure sensors

Adriana Cozma, Robert Puers

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 393 KB

english, 1997

9

Micromachining of (hhl) silicon structures: experiments and 3D simulation of etched shapes

C.R Tellier, S Durand

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 934 KB

english, 1997

10

Simulation of thermally induced package effects with regard to piezoresistive pressure sensors

Frank Schilling, Werner Langheinrich, Kurt Weiblen, Dieter Arand

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 270 KB

english, 1997

11

Analysis of compressional-wave influence on thickness-shear-mode resonators in liquids

Ralf Lucklum, Stefan Schranz, Carsten Behling, Frank Eichelbaum, Peter Hauptmann

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 783 KB

english, 1997

12

High-resolution high-voltage sensor based on SAW

A Fransen, G.W Lubking, M.J Vellekoop

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 525 KB

english, 1997

13

An experimental study of Love-wave acoustic sensors operating in liquids

J Du, G.L Harding, A.F Collings, P.R Dencher

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 698 KB

english, 1997

14

A contrast- and brightness-insensitive optoelectronic edge detector

Rainer Hoehler, Hans Strack

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 273 KB

english, 1997

15

Non-destructive in situ test for anodic bonding

JoséA Plaza, Jaume Esteve, Emilio Lora-Tamayo

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 426 KB

english, 1997

16

Metallic thin-film thermocouple for thermoelectric microgenerators

E Castaño, E Revuelto, M.C Martín, A García-Alonso, F.J Gracia

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 271 KB

english, 1997

17

A novel combined redundant pressure sensor with self-test function

Robert Puers, Dirk De Bruyker, Adriana Cozma

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 443 KB

english, 1997

18

Characterization of the influence of fabrication methods on microstructure failure

David G McIntyre, Shawn J Cunningham, Judd S Carper, Paul D Jaramillo, Svetlana Tatic-Lucic, Larry E Starr

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 603 KB

english, 1997

19

High-temperature ceramic pressure sensor

I Ayerdi, E Castaño, A García-Alonso, J Gracia

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 301 KB

english, 1997

20

Fluxgate sensor for magnetopneumometry

Pavel Ripka, Petr Navratil

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 392 KB

english, 1997

21

Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications

P.-F Indermühle, G Schürmann, G.-A Racine, N.F de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 497 KB

english, 1997

22

On the anodic passivation of silicon in aqueous KOH solutions

Daniel Lapadatu, Robert Puers

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 567 KB

english, 1997

23

CMOS fully digital integrated pressure sensors

M.-T Chau, D Dominguez, B Bonvalot, J Suski

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 312 KB

english, 1997

24

Deformation control of microbridges for flow sensors

T Matsuura, M Taguchi, K Kawata, K Tsutsumi

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 614 KB

english, 1997

25

Giant magnetoresistance and its application in recording heads

K.-M.H Lenssen, H.W van Kesteren, Th.G.S.M Rijks, J.C.S Kools, M.C de Nooijer, R Coehoorn, W Folkerts

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 742 KB

english, 1997

26

Micromechanical compartments for biotechnological applications: fabrication and investigation of liquid evaporation

Günter Mayer, J.Michael Köhler

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 717 KB

english, 1997

27

IC-compatible silicon wafer-to-wafer bonding

A Berthold, M.J Vellekoop

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 354 KB

english, 1997

28

A silicon avalanche photodiode for single optical photon counting in the Geiger mode

W.J Kindt, N.H Shahrjerdy, H.W van Zeijl

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 462 KB

english, 1997

29

A two-step electrochemical etch-stop to produce freestanding bulk-micromachined structures

D Eichner, W von Münch

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 748 KB

english, 1997

30

Microstructuring of silicon by electro-discharge machining (EDM) — part I: theory

Dominiek Reynaerts, Paul-Henri's Heeren, Hendrik Van Brussel

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 664 KB

english, 1997

31

A new fabrication method for borosilicate glass capillary tubes with lateral inlets and outlets

M.-A Grétillat, F Paoletti, P Thiébaud, S Roth, M Koudelka-Hep, N.F de Rooij

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 628 KB

english, 1997

32

Refractive-index measurements using an integrated Mach-Zehnder interferometer

Th Schubert, N Haase, H Kück, R Gottfried-Gottfried

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 387 KB

english, 1997

33

Bond-quality characterization of silicon-glass anodic bonding

Svetlana Tatic-Lucic, John Ames, Bill Boardman, David McIntyre, Paul Jaramillo, Larry Starr, Myoungho Lim

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 700 KB

english, 1997

34

Simulation model for micromechanical angular rate sensor

Timo Veijola, Heikki Kuisma, Juha Lahdenperä, Tapani Ryhänen

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 908 KB

english, 1997

35

Frontside micromachining using purous-silicon sacrificial-layer technologies

Th Bischoff, G Müller, W Welser, F Koch

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 769 KB

english, 1997

36

Porous silicon bulk micromachining for thermally isolated membrane formation

Cs Dücsö, É Vázsonyi, M Ádám, I Szabó, I Bársony, J.G.E Gardeniers, A van den Berg

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 836 KB

english, 1997

37

Inductive proximity sensor with a flat coil and a new differential relaxation oscillator

Ph.A Passeraub, G Rey-Mennet, P.A Besse, H Lorenz, R.S Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 494 KB

english, 1997

38

A digital piezoelectric accelerometer with sigma-delta servo technique

Andreea Spineanu, Philippe Bénabès, Richard Kielbasa

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 587 KB

english, 1997

39

Micromechanical inclinometer

U Mescheder, S Majer

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 572 KB

english, 1997

40

Some aspects of the piezoceramic materials utilized in sensitive hydrophones

T Necsoiu, Irinela Chilibon, M Robu, V Cåtuneanu, A Stan

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 185 KB

english, 1997

41

Optical power and intelligent sensors

M.R Al-Mohanadi, J.N Ross, J.E Brignell

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 478 KB

english, 1997

42

Pyroelectric thin-film sensor array

M Kohli, C Wuethrich, K Brooks, B Willing, M Forster, P Muralt, N Setter, P Ryser

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 833 KB

english, 1997

43

A flexible, light-weight multichannel sieve electrode with integrated cables for interfacing regenerating peripheral nerves

T Stieglitz, H Beutel, J.-U Meyer

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 503 KB

english, 1997

44

Surface quality of {111} side-walls in KOH-etched cavities

Chris Merveille

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 743 KB

english, 1997

45

Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiation

L Dobrzański, E Nossarzewska-Orłowska, Z Nowak, J Piotrowski

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 557 KB

english, 1997

46

A pressure transducer using a metallic triple-beam tuning fork

D.S Randall, M.J Rudkin, A Cheshmehdoost, B.E Jones

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 282 KB

english, 1997

47

Editorial Board

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 53 KB

english, 1997

48

Prediction ability of a lumped-element equivalent-circuit model for thickness-shear mode resonators in liquids

Hannu Välimäki, Jukka Lekkala, Hannu Helle

Journal:

Sensors and Actuators A: Physical

Year:

1997

Language:

english

File:

PDF, 553 KB

english, 1997

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