Porous silicon bulk micromachining for thermally isolated...

Sensors and Actuators A: Physical 1997 Vol. 60; Iss. 1-3

Porous silicon bulk micromachining for thermally isolated membrane formation

Cs Dücsö, É Vázsonyi, M Ádám, I Szabó, I Bársony, J.G.E Gardeniers, A van den Berg
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Volume:
60
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)01384-8
File:
PDF, 836 KB
english, 1997
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