Micromachined silicon bolometers as detectors of soft...

Sensors and Actuators A: Physical 1997 Vol. 60; Iss. 1-3

Micromachined silicon bolometers as detectors of soft X-ray, ultraviolet, visible and infrared radiation

L Dobrzański, E Nossarzewska-Orłowska, Z Nowak, J Piotrowski
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Volume:
60
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01512-4
File:
PDF, 557 KB
english, 1997
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