A model for the etch-stop location on reverse-biased pn...

A model for the etch-stop location on reverse-biased pn junctions

Daniel Lapadatu, Gjermund Kittilsland, Martin Nese, Svein M. Nilsen, Henrik Jakobsen
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Volume:
66
Year:
1998
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(97)01687-7
File:
PDF, 990 KB
english, 1998
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