Volume 66; Issue 1-3

Sensors and Actuators A: Physical

Volume 66; Issue 1-3

1

A model for the etch-stop location on reverse-biased pn junctions

Daniel Lapadatu, Gjermund Kittilsland, Martin Nese, Svein M. Nilsen, Henrik Jakobsen

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 990 KB

english, 1998

2

Offset reduction of Hall plates in three different crystal planes

Sandra Bellekom, P.M. Sarro

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 565 KB

english, 1998

3

Miniaturized infrared sensor using silicon diaphragm based on Golay cell

Kaoru Yamashita, Akishi Murata, Masanori Okuyama

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 423 KB

english, 1998

4

Surface-micromachined electrostatic microrelay

Ignaz Schiele, Jörg Huber, Bernd Hillerich, Frank Kozlowski

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 1022 KB

english, 1998

5

Eight-beam piezoresistive accelerometer fabricated by using a selective porous-silicon etching method

Jun-Hwan Sim, Chan-Seo Cho, Jin-Sup Kim, Jung-Hee Lee, Jong-Hyun Lee

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 631 KB

english, 1998

6

Human information sensor

Katsuya Morinaka, Kazuhiko Hashimoto, Shinji Tanaka, Nobuyuki Yoshiike

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 830 KB

english, 1998

7

Photolithographic packaging of silicon pressure sensors

H. Krassow, F. Campabadal, E. Lora-Tamayo

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 551 KB

english, 1998

8

A new contactless electrochemical etch-stop based on a gold/silicon/TMAH galvanic cell

C.M.A. Ashruf, P.J. French, P.M.M.C. Bressers, P.M. Sarro, J.J. Kelly

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 803 KB

english, 1998

9

Microfluidic motion generation with acoustic waves

Xu Zhu, Eun Sok Kim

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 690 KB

english, 1998

10

A surface-acoustic-wave gyro sensor

Minoru Kurosawa, Yoshimitsu Fukuda, Masaya Takasaki, Toshiro Higuchi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 731 KB

english, 1998

11

The autonomous impact resonator: a new operating principle for a silicon resonant strain gauge

Jan Bienstman, Joos Vandewalle, Robert Puers

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 1.00 MB

english, 1998

12

People-counting system using multisensing application

Kazuhiko Hashimoto, Chihiro Kawaguchi, Satoshi Matsueda, Katsuya Morinaka, Nobuyuki Yoshiike

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 707 KB

english, 1998

13

Electrothermal oscillator for film-thickness monitoring

Jinsoo Kim, Kensall D. Wise

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 692 KB

english, 1998

14

A flexible micromachined electrode array for a cochlear prosthesis

Tracy E. Bell, Kensall D. Wise, David J. Anderson

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 796 KB

english, 1998

15

A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation

Dirk De Bruyker, Adriana Cozma, Robert Puers

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 609 KB

english, 1998

16

Automated assembly of flip-up micromirrors

J. Robert Reid, Victor M. Bright, J.T. Butler

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 953 KB

english, 1998

17

Silicon mirrors and micromirror arrays for spatial laser beam modulation

Steffen Kurth, Ramon Hahn, Christian Kaufmann, Kersten Kehr, Jan Mehner, Udo Wollmann, Wolfram Dötzel, Thomas Gessner

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 816 KB

english, 1998

18

The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 1.03 MB

english, 1998

19

The Prandtl micro flow sensor (PMFS): a novel silicon diaphragm capacitive sensor for flow-velocity measurement

Oliver Berberig, Kay Nottmeyer, Jim Mizuno, Yoshitaka Kanai, Takashi Kobayashi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 599 KB

english, 1998

20

An integrated resonant accelerometer microsystem for automotive applications

Per Ohlckers, Reidar Holm, Henrik Jakobsen, Terje Kvisteroy, Gjermund Kittilsland, André Larsen, Martin Nese, Svein M. Nilsen, Alain Ferber

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 626 KB

english, 1998

21

New bulk accelerometer for triaxial detection

J.A. Plaza, H. Chen, J. Esteve, E. Lora-Tamayo

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 384 KB

english, 1998

22

Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon

B. Willing, M. Kohli, P. Muralt, N. Setter, O. Oehler

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 509 KB

english, 1998

23

Concave corner compensation between vertical (010)-(001) planes anisotropically etched in Si (100)

B. Nikpour, L.M. Landsberger, T.J. Hubbard, M. Kahrizi, A. Iftimie

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 899 KB

english, 1998

24

All-fibre acousto-optic modulator using ZnO piezoelectric actuators

C.R. Wuethrich, C.A.P. Muller, G.R. Fox, H.G. Limberger

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 401 KB

english, 1998

25

New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

W. Geiger, B. Folkmer, U. Sobe, H. Sandmaier, W. Lang

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 760 KB

english, 1998

26

Characterization of a novel piezo-tunneling strain sensor

A.P. Friedrich, P.A. Besse, C.M.A. Ashruf, R.S. Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 685 KB

english, 1998

27

A conduction-convection design for liquid flow sensing

Luis Castañer, Vicente Jiménez, Manuel Domínguez, Francesc Masana, Angel Rodríguez

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 722 KB

english, 1998

28

An electroformed CMOS integrated angular rate sensor

S. Chang, M. Chia, P. Castillo-Borelley, W. Higdon, Q. Jiang, J. Johnson, L. Obedier, M. Putty, Q. Shi, D. Sparks, S. Zarabadi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 651 KB

english, 1998

29

Design and fabrication of micromirror array supported by vertical springs

Jong-Woo Shin, Seok-Whan Chung, Yong-Kweon Kim, Bum Kyoo Choi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 636 KB

english, 1998

30

A novel deposition technique for fluorocarbon films and its applications for bulk- and surface-micromachined devices

Yoshinori Matsumoto, Kazumasa Yoshida, Makoto Ishida

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 732 KB

english, 1998

31

A fiber-optic pressure microsensor for biomedical applications

O. Tohyama, M. Kohashi, M. Sugihara, H. Itoh

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 460 KB

english, 1998

32

A vertically integrated media-isolated absolute pressure sensor

K. Goldman, G. Gritt, I. Baskett, W. Czarnocki, A. Ramirez, C. Brown, D. Hughes, D. Wallace, M. Shah

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 501 KB

english, 1998

33

Electrofluidic full-system modelling of a flap valve micropump based on Kirchhoffian network theory

P. Voigt, G. Schrag, G. Wachutka

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 660 KB

english, 1998

34

Offset reduction in Hall devices by continuous spinning current method

R. Steiner, Ch. Maier, A. Hàberli, F.-P. Steiner, H. Baltes

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 645 KB

english, 1998

35

Design of two-dimensional micromachined gyroscope by using nickel electroplating

T. Fujita, K. Maenaka, M. Maeda

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 575 KB

english, 1998

36

Vibration sensor using optical-fiber cantilever with bulb-lens

Mitsuteru Kimura, Katsuhisa Toshima

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 532 KB

english, 1998

37

Error analysis of material parameter determination with quartz-crystal resonators

Ralf Lucklum, C. Behling, P. Hauptmann, R.W. Cernosek, S.J. Martin

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 993 KB

english, 1998

38

IR bolometers made of polycrystalline silicon germanium

Sherif Sedky, Paolo Fiorini, Matty Caymax, Agnes Verbist, Chris Baert

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 708 KB

english, 1998

39

CMOS sensor systems

Bedrich J. Hosticka

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 907 KB

english, 1998

40

Operation of α(6H)-SiC pressure sensor at 500 °C

Robert S. Okojie, Alexander A. Ned, Anthony D. Kurtz

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 524 KB

english, 1998

41

Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer

J.C. Lötters, J.G. Bomer, A.J. Verloop, E.A. Droog, W. Olthuis, P.H. Veltink, P. Bergveld

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 869 KB

english, 1998

42

The structures for electrostatic servo capacitive vacuum sensors

Yuelin Wang, M. Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 585 KB

english, 1998

43

An integrated thermopile structure with high responsivity using any standard CMOS process

Tayfun Akin, Zeynel Olgun, Orhan Akar, Haluk Kulah

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 970 KB

english, 1998

44

Metallic profile and coin imaging using an inductive proximity sensor microsystem

Ph.A. Passeraub, P-A. Besse, C. de Raad, O. Dezuari, F. Quinet, R.S. Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 723 KB

english, 1998

45

Commercial vision of silicon-based inertial sensors

Cimoo Song, Meenam Shinn

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 759 KB

english, 1998

46

Monolithic pyroelectric infrared image sensor using PVDF thin film

Norio Fujitsuka, Jiro Sakata, Yukio Miyachi, Kentaro Mizuno, Kazuo Ohtsuka, Yasunori Taga, Osamu Tabata

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 731 KB

english, 1998

47

Efficient design and optimization of MEMS by integrating commercial simulation tools

Oliver Nagler, Michael Trost, Bernd Hillerich, Frank Kozlowski

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 689 KB

english, 1998

48

MicroJoinery: concept, definition, and application to microsystem development

C. González, R.L. Smith, D.G. Howitt, S.D. Collins

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 2.59 MB

english, 1998

49

Temperature dependence and drift of a thermal accelerometer

U.A. Dauderstädt, P.M. Sarro, P.J. French

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 579 KB

english, 1998

50

A bulk-micromachined three-axis accelerometer using silicon direct bonding technology and polysilicon layer

Kijin Kwon, Sekwang Park

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 637 KB

english, 1998

51

Thin-beam bulk micromachining based on RIE and xenon difluoride silicon etching

Risaku Toda, Kazuyuki Minami, Masayoshi Esashi

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 606 KB

english, 1998

52

Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection

Thierry Corman, Peter Enoksson, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 767 KB

english, 1998

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