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Surface-micromachined electrostatic microrelay
Ignaz Schiele, Jörg Huber, Bernd Hillerich, Frank KozlowskiVolume:
66
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(97)01703-2
File:
PDF, 1022 KB
english, 1998