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Eight-beam piezoresistive accelerometer fabricated by using a selective porous-silicon etching method
Jun-Hwan Sim, Chan-Seo Cho, Jin-Sup Kim, Jung-Hee Lee, Jong-Hyun LeeVolume:
66
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01704-4
File:
PDF, 631 KB
english, 1998