Electrothermal oscillator for film-thickness monitoring

Electrothermal oscillator for film-thickness monitoring

Jinsoo Kim, Kensall D. Wise
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Volume:
66
Year:
1998
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(97)01716-0
File:
PDF, 692 KB
english, 1998
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