Low-stress PECVD SiC thin films for IC-compatible...

Sensors and Actuators A: Physical 1998 Vol. 67; Iss. 1-3

Low-stress PECVD SiC thin films for IC-compatible microstructures

P.M. Sarro, C.R. deBoer, E. Korkmaz, J.M.W. Laros
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Volume:
67
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01730-5
File:
PDF, 712 KB
english, 1998
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