Volume 67; Issue 1-3

Sensors and Actuators A: Physical

Volume 67; Issue 1-3

1

Improved ultrasonic density sensor with reduced diffraction influence

A. Püttmer, R. Lucklum, B. Henning, P. Hauptmann

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 489 KB

english, 1998

2

On the mechanisms in thermally actuated composite diaphragms

Robert Puers, Adriana Cozma, Dirk De Bruyker

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 548 KB

english, 1998

3

An NMR magnetometer with planar microcoils and integrated electronics for signal detection and amplification

G. Boero, C. de Raad Iseli, P.A. Besse, R.S. Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 599 KB

english, 1998

4

Optical sensor system for the on-line measurement of carbon in fly-ash

A. Schneider, R. Chabicovsky, A. Aumüller

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 887 KB

english, 1998

5

Machining of three-dimensional microstructures in silicon by electro-discharge machining

Dominiek Reynaerts, Wim Meeusen, Hendrik Van Brussel

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 817 KB

english, 1998

6

Ultrasonic sensors for process monitoring and chemical analysis: state-of-the-art and trends

Peter Hauptmann, Ralf Lucklum, Alf Püttmer, Bernd Henning

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 1.95 MB

english, 1998

7

Laser-induced reversible change of electrical resistivity of CoSi2 thin-film sensors

M. Knite, A. Medvid, A. Grigonis

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 431 KB

english, 1998

8

An alternative method for determining the λ (H) function in magnetostrictive amorphous alloys

E. Hristoforou, H. Chiriac, M. Neagu

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 568 KB

english, 1998

9

On the Hall effect and resistivity of nanocomposite Ni-SiO2 thin films

Florin Rusu, Horia Chiriac, Mihai Lozovan, Maria Urse

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 494 KB

english, 1998

10

Ambient temperature coefficient of thermal piezoacoustic sensors operating in a twin configuration

Marian Kampik, Tadeusz Skubis

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 490 KB

english, 1998

11

Low-stress PECVD SiC thin films for IC-compatible microstructures

P.M. Sarro, C.R. deBoer, E. Korkmaz, J.M.W. Laros

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 712 KB

english, 1998

12

Design of SAW delay lines for sensors

Waldemar Soluch

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 457 KB

english, 1998

13

Accelerometer based on metal-silicon dislocation diode structures

P.P. Fastykovsky

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 264 KB

english, 1998

14

Effect of silicon oxide, silicon nitride and polysilicon layers on the electrostatic pressure during anodic bonding

J.A. Plaza, J. Esteve, E. Lora-Tamayo

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 511 KB

english, 1998

15

New UV-enhanced solar blind optical sensors based on monocrystalline zinc sulphide

Alexander Malik, Ana Sêco, Elvira Fortunato, Rodrigo Martins

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 437 KB

english, 1998

16

New fully integrated 3-D silicon Hall sensor for precise angular-position measurements

F. Burger, P.-A. Besse, R.S. Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 580 KB

english, 1998

17

Using a formal mathematics software for SH-APM sensor modelling

Irène Esteban, Corinne Déjous, Dominique Rebière, Jacques Pistré, Roger Planade

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 726 KB

english, 1998

18

A new measurement method for magneto-impedance in soft amorphous ferromagnets at microwave frequency

Luciano Brunetti, Paola Tiberto, Franco Vinai

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 481 KB

english, 1998

19

Simulation and design of microsystems: a 10-year perspective

Stephen D. Senturia

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 888 KB

english, 1998

20

Low-cost plastic sensor packaging using the open-window package concept

C. Cotofana, A. Bossche, P. Kaldenberg, J. Mollinger

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 610 KB

english, 1998

21

In situ investigation of ion drift processes in glass during anodic bonding

B. Schmidt, P. Nitzsche, K. Lange, S. Grigull, U. Kreissig, B. Thomas, K. Herzog

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 915 KB

english, 1998

22

Dynamic actuation of polyimide V-groove joints by electrical heating

Thorbjörn Ebefors, Edvard Kälvesten, Göran Stemme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 729 KB

english, 1998

23

Electrostatically deflectable polysilicon micromirrors — dynamic behaviour and comparison with the results from FEM modelling with ANSYS

M. Fischer, M. Giousouf, J. Schaepperle, D. Eichner, M. Weinmann, W. von Münch, F. Assmus

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 697 KB

english, 1998

24

Magnetic-field sensor based on a thin-film SOI transistor

Pere Losantos, Carles Cané, Denis Flandre, Jean-Paul Eggermont

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 671 KB

english, 1998

25

An optical current transducer for residual current sensing in the milliampere range

L.M. Martinez, P. Adl, R.T. Rakowski, A. Cheshmehdoost

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 759 KB

english, 1998

26

Progress in VLSI optical position-sensitive circuits

Marco Tartagni, Pietro Perona

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 619 KB

english, 1998

27

Smart optical sensor systems in CMOS for measuring light intensity and colour

G. de Graaf, R.F. Wolffenbuttel

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 572 KB

english, 1998

28

Spectral beam sampling and control by a planar optical transducer

M. Wiki, J. Dübendorfer, R.E. Kunz

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 575 KB

english, 1998

29

Highly sensitive motion detection with a combined microwave-ultrasonic sensor

H. Ruser, V. Mágori

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 779 KB

english, 1998

30

Oxidized porous silicon: a new approach in support thermal isolation of thermopile-based biosensors

V. Lysenko, Ph. Roussel, G. Delhomme, V. Rossokhaty, V. Strikha, A. Dittmar, D. Barbier, N. Jaffrezic-Renault, C. Martelet

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 659 KB

english, 1998

31

Microsystem for high-accuracy 3-D magnetic-field measurements

Ch. Schott, D. Manic, R.S. Popovic

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 534 KB

english, 1998

32

Improvement of pressure-sensor performance and process robustness through reinforcement of the membrane edges

A. Götz, F. Campabadal, C. Cané

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 378 KB

english, 1998

33

Media-isolated sensor

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 334 KB

english, 1998

34

New generation of infrared photodetectors

Jozef Piotrowski, Antoni Rogalski

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 884 KB

english, 1998

35

Global model generation for a capacitive silicon accelerometer by finite-element analysis

Y. Ansel, B. Romanowicz, P. Renaud, G. Schröpfer

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 618 KB

english, 1998

36

Full integration of a pressure-sensor system into a standard BiCMOS process

T. Scheiter, H. Kapels, K.-G. Oppermann, M. Steger, C. Hierold, W.M. Werner, H.-J. Timme

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 452 KB

english, 1998

37

Measurement of micromechanical properties of polysilicon microstructures with an atomic force microscope

C. Serre, P. Gorostiza, A. Pérez-Rodríguez, F. Sanz, J.R. Morante

Journal:

Sensors and Actuators A: Physical

Year:

1998

Language:

english

File:

PDF, 530 KB

english, 1998