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Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon
B. Willing, M. Kohli, P. Muralt, N. Setter, O. OehlerVolume:
66
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)01736-6
File:
PDF, 509 KB
english, 1998