![](/img/cover-not-exists.png)
Concave corner compensation between vertical (010)-(001) planes anisotropically etched in Si (100)
B. Nikpour, L.M. Landsberger, T.J. Hubbard, M. Kahrizi, A. IftimieVolume:
66
Year:
1998
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(97)01753-6
File:
PDF, 899 KB
english, 1998